X-ray optical systems calibration
Calibration of an X-ray optical element or system is based on specific test data analyzed with ray tracing tools generated in the design phase of the system. Additional metrology data is used as input. The final performance is validated and parameters that can be varied is identified and a comparison to actual data is made. An example of this capability was the design of an expanded beam X-ray calibration facility at a synchrotron which was used to calibrate the performance of an X-ray telescope.